TiN/Ti复合膜与多层膜对Ti811合金高温摩擦性能及微动疲劳抗力的影响  

The Effect of TiN/Ti Composite Film and Multilayer on Fretting Fatigue Resistance of Ti811 Alloy at Elevated Temperature

作　　者：张晓化[1] 刘道新[1] 王小锋[1] 唐宾[2] 

机构地区：[1]西北工业大学腐蚀与防护研究室,陕西西安710072 [2]太原理工大学表面工程研究所,山西太原030024

出　　处：《摩擦学学报》2009年第4期311-318,共8页Tribology

基　　金：国家自然科学基金资助项目(50671085;50771070);国家863高技术研究发展计划资助项目(2007AA03Z521)

摘　　要：在Ti811钛合金表面分别利用真空阴极电弧沉积技术和磁控溅射技术制备了TiN/Ti复合膜,利用磁控溅射技术制备了TiN/Ti多层膜,测试了膜层的剖面成分分布、膜基结合强度、膜层显微硬度和韧性,对比研究了不同结构膜层对钛合金基材摩擦学性能和高温微动疲劳抗力的影响.结果表明:TiN/Ti复合膜和多层膜均有效提高了钛合金表面的硬度和耐磨性能;电弧沉积TiN/Ti膜层对钛合金高温微动疲劳抗力的改善程度高于磁控溅射TiN/Ti膜层,原因归于电弧沉积TiN/Ti膜层强韧性好、结合强度高,且膜层中的钛颗粒有良好的减摩润滑作用;磁控溅射TiN/Ti多层膜对钛合金高温微动疲劳抗力的改善程度高于磁控溅射TiN/Ti复合膜层,原因是前者韧性高、减摩润滑作用显著.TiN/Ti composite film was prepared on Ti811 surface by vacuum cathode arc deposition （VCAD） and magnetron sputtering （MS） technique, respectively. TiN/Ti muhilayer was deposited by MS. The composition distribution, bonding strength, micro -hardness and ductility of the films were measured. The effects of the films with different structures on the tribological property and fretting fatigue （ FF ） resistance of the titanium alloy substrate at elevated temperature were comparatively studied. The results indicated that both the TiN/Ti composite film and the TiN/Ti multilayer effectively increased the hardness and wear resistance of the titanium alloy. The VCAD TiN/Ti composite film could significantly improve the FF resistance of the titanium alloy and was better than the MS TiN/Ti composite film because of the good toughness and high bonding strength of the VCAD TiN/Ti composite film with excellent lubrication of Ti particles in the film. The MS TiN/Ti multilayer were more effective in improving FF resistance than MS TiN/Ti composite film because the former had good toughness and antifriction properties.

关 键 词：微动疲劳 摩擦磨损 TiN/Ti复合膜 多层膜 真空阴极电弧沉积 磁控溅射 钛合金 高温 

分 类 号：TG115[金属学及工艺—物理冶金]