集成光学陀螺环形谐振腔的优化设计与制备  

Optimal Design and Fabrication of Ring Resonator in Optical Waveguide for IOG

作　　者：郭丽君[1] 石邦任[1] 赵猛[1] 吕昊[1] 赵振明[1] 陈晨[1] 

机构地区：[1]长春理工大学物理系,长春130022

出　　处：《光电工程》2009年第8期143-146,共4页Opto-Electronic Engineering

摘　　要：利用广角有限差分光束传播法(WA-BPM)对集成光学陀螺(IOG)用掺锗的二氧化硅光波导环形谐振腔进行了优化设计,详细分析了谐振腔的主要性能参数精细度F与各种损耗及光强耦合系数的关系。在优化设计基础上,在硅基底上利用等离子体增强型化学汽相沉积(PECVD)法与反应离子刻蚀(RIE)制作了掺锗的SiO2光波导环形谐振腔。经测试,在1550nm波长处,光波导传输损耗为0.02dB/cm,环形谐振腔内总传输损耗仅为0.1dB/circuit,可为今后集成光学陀螺的小型化和高灵敏度提供理论参考。Optimal design of ring resonator in silica optical wavegnide for Integration Optical Gyroscope （lOG） is presented by using Wide Angle Beam Propagation Method （WA-BPM）. Furthermore, relationship among the fmesse of ring resonator, the total loss and the power coupling ratio is analyzed. On the base of optimal design, we fabricated SiO2 optical waveguide ring resonator mixed Ge in Plasma Enhanced Chemical Vapor Deposition （PECVD） method. By testing at A=1 550 nm, propagation loss and total loss of ring resonator are 0.02 dB/cm and 0.1 dB/circuit, respectively, which can offer academic reference for the integration optical gyroscope＇s micromation and high precision.

关 键 词：光学陀螺 SiO2光波导 环形谐振腔 

分 类 号：TN629.1[电子电信—电路与系统]