减小正弦相位调制菲佐干涉仪多光束干涉影响的方法  

A Method to Reduce Influence of Multi-Beam Interference in Sinusoidal Phase Modulation Fizeau Interferometer

作　　者：李中梁[1,2] 王向朝[1] 刘英明[1] 唐锋[1] 

机构地区：[1]中国科学院上海光学精密机械研究所信息光学实验室,上海201800 [2]中国科学院研究生院,北京100039

出　　处：《中国激光》2009年第8期2115-2120,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(60578051);上海市科委基础研究重点项目(07JC14056)资助课题

摘　　要：在利用正弦相位调制菲佐干涉仪进行测量时,由于菲佐板及待测物体表面对入射光的多次反射而产生多光束干涉,干涉信号的强度随相位变化不是严格的余弦分布。按照双光束干涉的算法进行相位信息提取,会引入一定的误差。以正弦相位调制菲佐干涉仪纳米精度微小位移测量为应用背景,分析多光束干涉情况下该干涉仪信号解调算法的误差,进而对干涉仪的相关参数进行优化,并通过误差补偿对测量结果进行修正,有效减小了多光束干涉产生的影响。In a Fizeau interferometer using sinusoidal phase modulation technique, the variation of interference intensity with optical path difference （OPD） does not follow a rigorous cosine behaviour any more. This is because the presence of multi-reflection between the reference plate and the surface under test leads to multi-beam interferences. If the interference signal is processed according to double-beam interference theory, non-ignorable measurement error can be produced. In this paper, a sinusoidal phase modulation Fizeau interferometer used to measure micro-displacement with nanometer precision is established. The measurement error caused by multi-beam interference is analyzed in detail. Some parameters of the Fizeau interferometer are optimized and the measurement results are corrected using error compensation algorithm, so that the influence of multi-beam interference is reduced effectively.

关 键 词：测量 多光束于涉 参数优化 误差补偿 正弦相位调制 

分 类 号：TH744.3[机械工程—光学工程]