Mg_xZn_(1-x)O:Al靶材制备工艺和Mg掺杂对微观结构的影响研究  

Research on Preparation of Mg_xZn_(1-x)O:Al Target and Influence of Mg Doping on the Microstructure

作　　者：黄竹[1] 王华[1] 许积文[1] 杨玲[1] 任明放[1] 

机构地区：[1]桂林电子科技大学信息材料科学与工程系,桂林541004

出　　处：《材料导报》2009年第16期95-98,共4页Materials Reports

基　　金：广西教育厅基金(桂教科研200734)

摘　　要：以纳米级的ZnO、MgO和Al2O3粉体为原料,经过湿式球磨得到了混合粉体,采用常压固相烧结的方法制备了高致密度MgxZn1-xO:Al陶瓷靶材,研究了预烧粉体、Mg掺杂量和烧结温度对靶材微观结构和性能的影响。研究表明,预烧粉体可以减少第二相的生成;随着Mg掺杂量的增加,MgO立方相逐渐增多,在x=0.3时产生了相分离;在1100～1300℃内,随着烧结温度的升高,靶材的晶粒大小和密度逐渐增大,增大趋势在1300℃后变缓,1300℃烧结4h可以制得结构均匀、高致密度的MgxZn1-xO:Al靶材。Nano scale ZnO,MgO and Al2O3 powder are used as raw material, the MgxZn1-xO：Al target with high density is obtained by pressureless sintering after alumina milled in alcohol- The influence of presintering powder, Mg content and sintering temperature on microstructure of target is studied by scanning electron microscopy（SEM） and X-ray diffraction（XRD）. The experiment results indicate that presintering powder may decrease produce of the second phase nucleation. With the increase of Mg content, the cubic phase gradually increases, and when the value of x is 0. 3, phase separation is observed. The grain size and density of target become obviously higher from 1l00℃ to 1300℃, and the rising-trend becomes slower after 1300℃. The MgxZn1-xO：Al target that has higher desity and homogeneous rnicrostructure can be acquired at 1300℃ for 4h.

关 键 词：MgxZn1-xO:Al靶材 预烧 Mg含量 烧结工艺 微观结构 

分 类 号：TB383[一般工业技术—材料科学与工程]