Cu_2O薄膜的制备方法  

Preparation of Cu_2O Thin Films

作　　者：孙杰[1] 高斐[1] 权乃承[1] 晏春愉[1] 张佳雯[1] 郝培风[1] 刘立慧[1] 

机构地区：[1]陕西师范大学物理学与信息技术学院,陕西西安710062

出　　处：《材料开发与应用》2009年第4期93-96,共4页Development and Application of Materials

摘　　要：氧化亚铜(Cu2O)薄膜在太阳能电池及其它光电器件上有重要应用,它具有无毒、制备成本低、材料广泛易得等优点。制备Cu2O薄膜的方法主要有热蒸发、溅射、化学气相沉积和电化学沉积等,本文对Cu2O薄膜的制备方法进行了综述与展望。Cu2O thin films have important applications in solar cells and photoelectric devices for their advantages such as non-toxlcity, low production cost and abundance of the material. Cu2O thin films can be prepared by using various deposition teehniques such as thermal evaporation, sputtering, chemical vapor deposition and eleetrodeposition. The preparation methods of Cu2O thin films have been reviewed and prospected in this paper.

关 键 词：氧化亚铜薄膜 热蒸发 溅射 化学气相沉积 

分 类 号：TB34[一般工业技术—材料科学与工程]