四相敏感元件测量三轴力的传感方法研究  

Study on measuring three-axis force with four-part sensing elements

作　　者：刘嘉敏[1] 黄虹溥[1] 潘英俊[1] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《传感器与微系统》2009年第8期52-55,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(69785007)

摘　　要：三轴力传感器技术正在成为近年来的研究热点。研究一种利用四相敏感元件来测量三轴力的传感方法,并为三轴力的计算找到了一个通用的计算模型。通过对几种典型的基于力信号、电信号和光信号原理的三轴力传感器的实验结果进行分析,验证了利用四相敏感元件测量三轴力的可行性和可靠性。期望该方法能够对其他三轴力传感器的设计提供有益的帮助。As most researches focus on the three-axis force sensors in recent years, a general formula is summarized through research on measuring three-axis force with four-part sensing elements based on mechanical signals, electrical signals and optical signals. With the experimental results, the feasibility and reliability of measuring three-axis force with four-part sensing elements are verified. It is expected that this formula can benefit the design and fabrication of new tactile sensing systems.

关 键 词：三轴力 四相敏感元件 力信号 电信号 光信号 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]