Si微陀螺结构与接口电路的混合仿真  

Co-Simulation of Silicon Micromechanical Gyroscopes with Interface Circuits

作　　者：兰靖[1] 苑伟政[1] 常洪龙[1] 周志广[1] 崔金强[1] 

机构地区：[1]西北工业大学微/纳米系统重点实验室,西安710072

出　　处：《微纳电子技术》2009年第8期477-483,共7页Micronanoelectronic Technology

基　　金：航空科学基金项目(20070853012)

摘　　要：为了快速有效地验证接口电路的可行性,对Si微陀螺建模方法及陀螺结构与接口电路的混合仿真方法进行了研究。在Si微陀螺动力学特性分析的基础上,利用硬件描述语言建立一种以低阶微分方程描述的Si微陀螺解析模型,该模型利用Si微陀螺运动特性来描述陀螺模态之间的耦合行为。利用该模型实现了陀螺结构与接口电路的快速混合仿真。对Si微陀螺自激控制环路进行分析制作了实验电路板,并对电路仿真结果进行了实验验证,测试结果与仿真结果趋势一致。实验表明,该方法能够快速有效地验证接口电路的可行性,为设计Si微陀螺接口电路提供了依据。The method for the silicon micro-gyroscope modeling and the co-simulation of the gyroscope structure with its interface circuit were researched in order to evaluate the interface circuit of the micro-gyroscope. Based on the dynamics analysis of the silicon micro-gyroscope, an analytical model described by the low-order differential equations was established using the hardware description language （HDL）. The model describes the coupling behavior between the driving and sensing modals utilizing the dynamic characterizations of the micro-gyroscope. By using this model, the co-simulation of the gyroscope structure with its interface circuit was completed. Based on the analysis of self-oscillation-driven control loop, the circuit board was designed. The results were verified by the experiments, and the trend of the testing results was consistent with that of the simulation results. Through the comparison, it is proved that the method is feasible to estimate the interface circuit quickly and effectively, and it provids the evidence for designing the interface circuit of the silicon micro-gyroscope.

关 键 词：Si微陀螺 自激驱动 微机电系统 解析模型 硬件描述语言 

分 类 号：TH703[机械工程—仪器科学与技术] TP391.9[机械工程—精密仪器及机械]