交叉效应对光栅光调制器阵列的影响  

Influence of crosstalk effect on grating light modulator array

作　　者：金珠[1,2] 温志渝[1,2] 张智海[1,2] 黄尚廉[1,2] 

机构地区：[1]重庆大学新型纳米器件与系统技术国家重点学科实验室,重庆400044 [2]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《光学精密工程》2009年第8期1790-1797,共8页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60708017);重庆市院士基金资助项目(No.CSTC;2008BC3002)

摘　　要：为了讨论交叉效应对无源矩阵驱动的光栅光调制器的影响,建立了无源矩阵驱动光栅光调制器的电学模型。介绍了光栅光调制器的工作原理和驱动电压。利用基尔霍夫的电流定理和电压定理,对该无源矩阵驱动阵列的电学模型进行化简分析,得到了交叉效应中半选点像素、非选点像素与全选点像素之间的电压关系。实验测得器件的驱动电压,并对加工的阵列器件进行交叉效应验证,得到这3种像素的±1级衍射光强与全选点像素驱动电压的关系。最后,提出两种抑制交叉效应的方法。实验结果显示:光栅光调制器的工作电压为8V,吸合电压约8.5V时;对于加工的16×16阵列,半选点像素电压约为全选点像素电压的1/2,且远大于非选点像素电压,结论与交叉效应理论分析一致。结果表明:交叉效应会降低阵列的光学对比度和光利用率,而器件较低的驱动电压有利于与有源矩阵电路实现单片集成,消除器件的交叉效应。In order to discuss the influence of the crosstalk effect on a Grating Light Modulator（GLM） driven by a passive matrix, an electrical model of the GLM array addressed by the passive matrix is established. The operation principle and the driving voltage of the GLM are presented, and the electrical model is analyzed and simplified according to the Kirchhoff＇s Current Law（KCL） and Kirchhoff＇s Voltage Law（KVL）. The voltage relationships among the half-selected pixel, non-selected pixel and the all-selected pixel are obtained. Then, the operating voltage and the pull-in voltage of the GLM are measured by an experiment and the crosstalk effect is validated by another experiment, so that the relationship between the ±1 order diffractive intensity of those three kinds of pixels and the driving voltages of all selected pixels is gained. Finally, two methods for restraining the crosstalk effect are proposed. The experiment shows that the operating volta 8.0 V and 8.5 V respectively. It also indicates that the vo ge Ita and the pull-in voltage of the GLM are ge of half-selected pixel is approximately half of the all-selected pixel, and is much larger than that of the non-selected pixel, which is consistent with the theory of crosstalk effect. These results illustrate that the crosstalk effect can reduce the contrast ratio and light utilization of the GLM, but selecting a lower driving voltage can realize the monolithic integration of the GLM and the active matrix and can eliminate the crosstalk effect.

关 键 词：微机电系统 光栅光调制器 交叉效应 无源矩阵驱动 

分 类 号：TN256[电子电信—物理电子学] TN761