CaO-B_2O_3-SiO_2系LTCC流延生料带研制  

Development on green tapes of CaO-B_2O_3-SiO_2 system LTCC

作　　者：朱海奎[1] 周洪庆[1] 刘敏[1] 韦鹏飞[1] 宁革[1] 

机构地区：[1]南京工业大学材料科学与工程学院,江苏南京210009

出　　处：《电子元件与材料》2009年第9期17-19,共3页Electronic Components And Materials

基　　金：国家"863"计划资助项目(No.2007AA03Z455)

摘　　要：研究了CaO-B2O3-SiO2系LTCC流延生料带的固含量对干燥收缩系数α以及生料带微观结构的影响。结果表明,生料带的α随着固含量的增加而增大,w(固含量)为40%,45%,50%和55%浆料的α分别为0.35,0.43,0.53和0.57。w(固含量)为50%的生料带上下表面颗粒分布最为均匀致密,烧成生料带的介电性能优良:εr≈6.5,tanδ<0.002(10GHz),适用于无源集成电路基片。Effects of solid content of CaO-B2O3-SiO2 system LTCC slurry on the drying shrinkage factor α and microstructures of green tapes were investigated. The results show that the values of a increase from 0.35 to 0.57 with the enhancing w（solid content） from 40% to 55%. The upper and bottom surface microstructure of the green tape with w（solid content） of 50% is the most uniform. The sintered samples possess excellent dielectric properties：ετ ≈ 6.5, tanδ〈0.002 at 10 GHz, which could be used as the LTCC materials for passive device substrates.

关 键 词：无机非金属材料 LTCC CAO-B2O3-SIO2 生料带 

分 类 号：TM28[一般工业技术—材料科学与工程]