大型机件测距系统精度分析  

Precision analysis of large-scale work ranger system

作　　者：周秀云[1] 张涛[2] 

机构地区：[1]电子科技大学自动化学院,四川成都610054 [2]四川大学激光应用技术研究所,四川成都610065

出　　处：《中南大学学报（自然科学版）》2009年第4期1022-1027,共6页Journal of Central South University:Science and Technology

基　　金：国家自然科学基金资助项目(50275101)

摘　　要：为了提高无导轨大尺寸测量系统的精度,以具有较强稳定度和抗干扰能力的双纵模热稳频He-Ne激光器为光源,采用数字滤波提高信噪比,利用小波变换具有空间局部化的特性和表征信号奇异性的能力,在适当尺度下刻画大尺寸测量信号的过零点,进行小波锐化,以提高节点对准精度。研究结果表明:室外时拍频频率稳定度可达10-7;系统节点对准误差小于30μm;小波锐化能把双纵模无导轨大尺寸拍频干涉仪的测量精度从60μm提高到30μm。The frequency-stabilized He-Ne laser with thermoregulation was used as the light source, which operates on the double longitudinal modes, has high frequency stability and good anti-disturbance performance. Numeral filter was used to raise signal-to-noise. Using the wavelet transform with the characteristic of spatial localization and signal singularity detection ability, the local zero point of single from the large size measurement system were accurately detected on appropriate scale and edged. The precision of ranger of laser no-guide larger size was raised, Experiment results show that the beat-frequency stability can reach 10^-7 in open air, error of node orientation is lower than 30 μm and wavelet transform can increase non-guide beat-wave ranger＇s precision from 60 μm to 30 μm.

关 键 词：无导轨 精度 拍波 节点确定误差 小波变换 

分 类 号：TH744.3[机械工程—光学工程]