用程差衍射器件实现激光干涉无导轨测距  

No Guide Distance Measurement Using Laser and Path Difference Diffraction Element

作　　者：李孟超[1] 刘铁英[1] 庄松林[1] 包学诚[2] 

机构地区：[1]上海理工大学仪器仪表学院,上海200093 [2]上海交通大学物理系,上海200030

出　　处：《光学仪器》1998年第4期18-21,共4页Optical Instruments

基　　金：国家自然科学基金;实研设计由机械工业部人才科技基金;上海市科技发展基金!94ZA14033

摘　　要：提出在以半导体激光器为光源的迈克尔逊干涉系统的一臂中，插入一 栅距具特定分布的衍射光栅，使干涉场中各点的光程与待测合作目标的光程成 对应相等的关系，进而可使目标的距离相应地反映于干涉平面上，实现绝对测距 的目的。A diffraction grating introducing distance distributed is inserted in one arm of the Michelson interferometer system in which light source is the semiconductor laser. The insertion of the diffraction grating make the optical path at different area in the interference field and that of the object which is being measured corresponding equal,thus the distance of the object can make fringe groups in the interference plane.

关 键 词：程差衍射器件 干涉场 测距 激光干涉 无导轨测距 

分 类 号：P225.2[天文地球—大地测量学与测量工程]