厚膜电容式压力传感器  

Thick-film capacitive pressure transducer

作　　者：常慧敏[1] 周平[1] 高理升[1] 王英先[1] 徐智晴[1] 刘春艳[1] 

机构地区：[1]中科院合肥智能机械研究所

出　　处：《传感器世界》2009年第8期15-17,共3页Sensor World

摘　　要：介绍一种厚膜电容式压力传感器,它以陶瓷弹性体和盖板为电容的电极,电极材料为钯银导体,传感器包括压力敏感芯片和电容—电压转换电路,该芯片是由两块能牢固键合成一体的基板组成,基板材料为96%Al2O3陶瓷。传感器量程为0～200kPa,电容值20pF,非线性0.3%,工作温度-20～+85℃,零点温漂小于200ppm/℃。具有易于批量生产、性能/价格比高等技术优势。A thick-film capacitive pressure transducer is presented in this paper, in which the ceramic elastomer and cover board made of Pd-Ag are treated as electrodes of capacitor. The transducer includes pressure-sensitive chips and capacitance-voltage converter. The chip consists of two bonding substrates made of 96% Al2O3 . The pressure measuring range is 0 - 200 kPa, the capacity value is about 20pF, the nonlinearity is 0.3%, the operating temperature is -20 ℃ -＋85 ℃, the zero thermal shift is less than 200 ppm/℃ o This transducer has advantages of easy mass production and high costperformance ratio.

关 键 词：厚膜 电容式 压力敏感芯片 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]