一种电热驱动法布里-珀罗光调制器  

An Electro-thermal Actuated Fabry-Perot Light Modulator

作　　者：韦玮[1,2] 黄尚廉[1,2] 金珠[1,2] 王宁[1,2] 史玲娜[1,2] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044 [2]重庆大学微系统研究中心,重庆400044

出　　处：《光子学报》2009年第9期2200-2204,共5页Acta Photonica Sinica

基　　金：国家自然科学基金(60708017);重庆市院士基金(CSTC;2008BC3002)资助

摘　　要：提出了一种用于显示基于微机电系统的电热驱动法布里-珀罗光调制器.利用多光束干涉理论分析了该调制器的原理及光学特性.分析表明:当腔长为(2k+1)λ/4时,反射光强取极大值;当腔长为2kλ/4时,反射光强取极小值;通过改变腔长可以实现显示.光源谱宽越窄,衬比度越高;干涉级次越低,衬比度越高;衬比度随反射率的增加而减小.借助Ansys软件仿真分析了调制器的驱动特性.加工了器件并搭建实验装置进行了动态响应特性测试实验.结果表明,该调制器具有驱动电压低至3.2 V,响应速度约为5 kHz的良好驱动特性.实验结果初步验证了该结构的可行性.An electro-thermal actuated Fabry-Perot light modulator based on Micro-Electro- Mechanical Systems for display is proposed. The device utilizes the force produced by bi-morph thermal structure to change the cavity length of the modulator when an current is applied. The principle of the light modulator is analyzed. When cavity length of modulator is （2k）λ/4, reflective light intensity is zero, and when then cavity length is （2k ＋1）λ/4, reflectivity intensity achieves maximum value 4RIi/（1 ＋R）2. With this characteristic,this modulator caff be used for display. Then influence on light modulator of light source spectrum,interference order,and reflectivity are analyzed. Results show that the narrower spectrum is, the higher contrast ratio;the lower interference order is, the higher contrast ratio is; contrast ratio decreases with the increase ofreflectivity. The electro-thermal actuating bimorph layer structure is designed. Its actuating characteristics are simulated by Ansys software. And, the modulator is fabricated and its responsible characters is tested. The result shows that this structure has low actuating voltage （3.2 V） and high response frequency （5 kHz）. The feasibility of this light modulator is proved.

关 键 词：微机电系统 光调制器 法珀 电热驱动 显示 

分 类 号：TN256[电子电信—物理电子学]