基于多层膜技术的硬X射线Laue透镜衍射效率的理论研究  

Diffraction Efficiency of Multilayer-Based Laue Lens for Hard X-ray Focusing

作　　者：黄秋实[1] 李浩川[1] 朱京涛[1] 桑田[1] 王占山[1] 陈玲燕[1] 

机构地区：[1]同济大学物理系,精密光学工程技术研究所,上海200092

出　　处：《光子学报》2009年第9期2299-2304,共6页Acta Photonica Sinica

基　　金：国家自然科学基金(10675092);上海市教育发展基金会晨光计划(2008CG25);同济大学青年优秀人才培养行动计划资助

摘　　要：采用耦合波理论分析了X射线在多层膜Laue透镜中的传播,选择Cu的Kα线作X射线光源,计算了多层膜Laue透镜的衍射效率.材料为WSi2/Si,最外层宽度为10 nm,深度为8 500 nm的多层膜Laue透镜,倾斜情况下外层区域局部光栅的衍射效率可达59%,理论上证明了多层膜Laue透镜是实现X射线聚焦的有效手段.The transmission of X-ray in Laue Lens is analyzed by the coupled wave theory. The diffraction efficiency of multilayer Laue Lens is calculated using Cu Ka line as the X-ray source. For the WSi2/Si multilayer Laue Lens with the outmost layer width of 10 nm, and the depth of 8 500 nm, the diffraction efficiency of the local gratings in the outer area reaches 59% in the case of tilted. Multilayer Laue Lens is proved to be an effective focusing method theoretically.

关 键 词：X射线光学 多层膜 耦合波理论 效率 倾斜波带片 

分 类 号：O434[机械工程—光学工程]