两步浸蚀法预处理对火焰法沉积金刚石膜形貌、结构和性能的影响  

Effect of Two-step Etching Pretreatment on Diamond Films Flame-deposited onto Hardmetal

作　　者：朱晖朝[1] 雷淑梅[2] 陈丽凤[2] 朱红梅[2] 朱斌[2] 匡同春[2] 

机构地区：[1]广州有色金属研究院,广东广州510651 [2]华南理工大学分析测试中心,广东广州510641

出　　处：《硬质合金》2009年第3期148-151,共4页Cemented Carbides

基　　金：广东省科技计划项目(工业攻关计划)(2004B10301032;2008B01060033)联合资助

摘　　要：两步浸蚀法是有效改善硬质合金基体表面沉积金刚石膜质量的一种预处理方法。本文采用两种不同酸剂的两步浸蚀法分别对YG6硬质合金基体进行了表面预处理,然后在其上火焰法沉积金刚石膜,初步探讨了预处理工艺不同酸剂对金刚石膜形貌、组成和结构的影响。实验结果表明,两步浸蚀法预处理能有效抑制合金基体中粘结相Co促进石墨生长的催化效应,两种火焰沉积产物已连续成膜,主要为超细金刚石、少量石墨。Two-step etching pretreatment is proved to effectively improve the quality of diamond film deposited onto hardmetal substrate. Different two-step methods using various acids have been utilized for the cobalt cemented tungsten carbide （WC-6%Co, hereafter referred to as simply YG6）, then diamond films were deposited onto them by diffusion game. The effect of different pretreatment process on the morphology, compositions and microstructure of the diamond film are preliminarily discussed. The results showed that two-step pretreatment method can restrain the cobalt catalytic effect of graphitization. The two kinds of flame-deposited materials form continuous film. They are mainly ultrafine diamond and fewer graphite.

关 键 词：两步浸蚀法 扩散火焰 硬质合金 金刚石膜 

分 类 号：TG174.4[金属学及工艺—金属表面处理]