基于声表面波的微驱动技术的发展  

Trends of Micro Actuators Based on Surface Acoustic Waves

作　　者：张冠[1] 李以贵[1] 

机构地区：[1]上海交通大学微纳科学技术研究院,薄膜与微细技术教育部重点实验室,微米纳米加工技术国家级重点实验室,上海200240

出　　处：《微纳电子技术》2009年第9期540-545,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(60777016)

摘　　要：基于声表面波技术近年来在微驱动技术领域快速发展的现状以及声表面波器件在生物、医疗、片上实验室等领域具有广阔应用前景的重要意义,就近几年来声表面波微驱动器的最新应用做了简要总结,介绍了声表面波,包括叉指换能器的结构和声表面波产生原理。着重介绍了声表面波在新型器件方面的多种最新应用,主要包括微流体加热、微流体雾化、微粒集聚/混合、微流体驱动、线性固体驱动以及平面固体驱动等,并分析了目前研究过程中存在的一些技术难点和解决方案。The surface acoustic wave has been widely used as one of the technologies for micro actuators. Meanwhile, the devices based surface acoustic waves will have a wide range application in biological, medical, lab-on-a-chip and other areas because these devices are high-precision, low power, low cost, miniaturization and can be easily batch-produced. The development of micro actuators based on surface acoustic waves in recent years is summarized. The surface acoustic waves are described, with emphasis on the basic structure of inter digital transducer and the theory of producing surface acoustic waves. The applications of surface acoustic waves on the new devices are highlighted, including the micro-fluid heater, micro-fluid atomizer, particle concentration/ mixing, micro-fluid driver, linear actuator, planar actuator and so on. The technical difficulties and solutions to the micro actuators based on surface acoustic waves are analyzed.

关 键 词：声表面波 微流体加热 微流体雾化 微粒集聚/混合 微流体驱动 线性固体驱动 平面固体驱动 

分 类 号：TN65[电子电信—电路与系统] TH703[机械工程—仪器科学与技术]