一种新型MEMS离面驱动器的设计与分析  

Design and Analysis of a Novel MEMS Out-of-Plane Actuator

作　　者：任豪[1,2] 姚军[1] 胡放荣[1,2] 邱传凯[1] 

机构地区：[1]中国科学院光电技术研究所微细加工与光学技术国家重点实验室,成都610209 [2]中国科学院研究生院,北京100039

出　　处：《微纳电子技术》2009年第9期546-550,556,共6页Micronanoelectronic Technology

基　　金：中科院创新基金资助项目(CXJJ-09-S05);所长基金项目(C06K022)

摘　　要：提出了一种基于静电排斥效应的MEMS离面驱动器,在消除静电拉入效应的同时得到了较大的静电排斥力。驱动器主要由三个下极板、一个上极板和弹簧梁组成。首先进行了静电排斥现象原理的分析,然后对弹簧梁中有和没有横梁时的弹性系数和模态进行了详细分析和对比,最后对驱动器的行程、驱动力、频率响应和带宽等性能进行了分析。结果表明,存在横梁时结构更加稳定,施加200V电压时,结构有2.5μm的位移和28μN的驱动力,而且带宽约为7kHz。该驱动器可运用于光通信和空间光调制等领域。A MEMS actuator based on a repulsive electrostatic force was proposed, which can achieve the large out-of-plane force and eliminate the electrostatic pull-in effect. The actuator consists of three bottom electrodes, one upper electrode and two serpentine springs. The principal of the electrostatic repulsive force was analyzed. The elastic coefficient of the serpentine spring and the modes of the actuator with and without the beam were discussed and compared in detail. Then the performances of the actuator, including the stroke, actuating force, resonant frequency and bandwidth, were analyzed. The result shows that the structure with the beam is more stable, a displacement of 2.5μm, a force of 28μN and a bandwidth of about 7 kHz are achieved at 200 V. The actuator can be used in the fields of optical communication and spatial light modulators.

关 键 词：微机电系统 静电排斥驱动器 蛇形弹簧梁 模态 行程 带宽 

分 类 号：TP211.6[自动化与计算机技术—检测技术与自动化装置] TH703[自动化与计算机技术—控制科学与工程]