SAW-SXFA气体传感器敏感膜性质的研究  

Study of sensitive coating character of SAW-SXFA gas sensor

作　　者：潘勇[1] 黄启斌[1] 王艳武[1] 曹丙庆[1] 

机构地区：[1]防化研究院,北京102205

出　　处：《化学传感器》2009年第3期42-46,共5页Chemical Sensors

基　　金：国家自然科学基金重点项目(No.10834010)资助课题

摘　　要：以SXFA聚合物为敏感膜材料制备了能够检测有机膦化合物的声表面波传感器,介绍了敏感膜材料SXFA的镀膜方法,以理论计算和原子力显微镜对敏感膜进行了证实,研究了SAW-SXFA传感器在不同膜厚度下的频率变化、不同膜厚度的传感器对检测有机膦化合物的响应结果,并对检测机理进行了初步讨论。Surface acoustic wave （SAW） sensor which could be used to detect organphosphorus coupounds was prepared with fluoroaleoholpolysiloxane （SXFA） sensitive material. The preparing method of SXFA coating was in- troduced, the sensitive coating was proved with theory caeulation and atom force microscope technology. The fre- quency drifs of different thickness coating sensor, the response to organophosphorus compounds deteced by different thickness coating sensor were studied,and the detection mechanism was disscussed.

关 键 词：SAW SXFA 传感器 敏感膜 性质 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]