O_2气中激光烧蚀Ta_2O_5产物离子的氧化反应  

Formation of lonic Ta-containing Oxides from laser Ablation of Ta_2O_5 in Ambient O_2

作　　者：辜振宁[1] 王雪峰[1] 秦启宗[1] 陈宏[2] 郑兰荪[2] 

机构地区：[1]复旦大学激光化学研究所,上海200433 [2]厦门大学化学系固体表面物理化学国家重点实验室,厦门361005

出　　处：《物理化学学报》1998年第11期961-964,共4页Acta Physico-Chimica Sinica

基　　金：国家自然科学基金!29683001

摘　　要：The mass spectra of both positive and negative charged Ta-containing ions from laser ablatiou of Ta2O5 were measured using a time-of-flight mass spectrometer. Formation of iomc Ta-containing oxides such as TaO and TaO from Ta2O5 ablation in ambient O2 were observed for the first time. The influence of ambient O2 pressure on the intensities of ablated Ta-containing ions has also been studied. It is found that the subsequent oxidation reactions were involved in the ablation of Ta2O5 at different O2 pressure. The enthalpies of possible okidation reactions were theoretically calculated, and the possible formation reastions of the ionic Ta-contauing oxides are discussed.The mass spectra of both positive and negative charged Ta-containing ions from laser ablatiou of Ta2O5 were measured using a time-of-flight mass spectrometer. Formation of iomc Ta-containing oxides such as TaO and TaO from Ta2O5 ablation in ambient O2 were observed for the first time. The influence of ambient O2 pressure on the intensities of ablated Ta-containing ions has also been studied. It is found that the subsequent oxidation reactions were involved in the ablation of Ta2O5 at different O2 pressure. The enthalpies of possible okidation reactions were theoretically calculated, and the possible formation reastions of the ionic Ta-contauing oxides are discussed.

关 键 词：激光烧蚀 离子氧化 五氧化二钽薄膜 PLC 制备 

分 类 号：O614.513[理学—无机化学]