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作 者:张佳[1] 廖家轩[1] 潘笑风[1] 王洪全[1] 傅向军[1] 魏雄邦[1]
机构地区:[1]电子科技大学电子科学技术研究院,成都610054
出 处:《硅酸盐通报》2009年第B08期90-93,共4页Bulletin of the Chinese Ceramic Society
基 金:电子科技大学中青年学术带头人培养计划(No.Y02018023601053);博士点基金(20060614021);四川省应用基础研究项目(2008JY0057)
摘 要:以聚乙烯吡咯烷酮(polyvinyl pyrrolidone,PVP)为添加剂采用改善的溶胶凝胶法制备了Ba0.6Sr0.4TiO3(BST)薄膜,并采用扫描电镜(SEM)及原子力显微镜(AFM)研究了薄膜的表面结构与介电性能。结果表明:PVP显著改善了BST薄膜的表面形貌,当PVP:Ti的物质的量比为0.7%时,BST薄膜表面形貌最佳,光滑致密无裂纹无缩孔。X射线光电子能谱(XPS)表明,PVP有助于减少BST薄膜表面非钙钛矿结构。介电性能测试表明,在40V外加电压下BST薄膜的介电调谐率达45%,零偏压下的介电损耗低于0.02。另外,对PVP的作用机理进行了讨论。Polyvinyl pyrrolidone (PVP)-added barium strontium titanate (BST) films were prepared by improved sol-gel method. The surface structures and dielectric properties of the films were studied. SEM and AFM exhibit that the as-prepared BST films show significantly improved surface morphologies. As the mol ratio of PVP/Ti is around 0.7% , BST films are smooth and compact with no crack or shrinkage cavity. XPS illustrates that PVP is beneficial to reduce film surface non-perovskited structure. Meanwhile, the BST films show tunability of more than 45% at 40 voltage, and dielectric loss (tan) of less than 0.02 at zero bias. The related mechanism of PVP is discussed.
关 键 词:改善溶胶凝胶法 钛酸锶钡薄膜 聚乙烯吡咯烷酮(PVP) 介电性能
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