分割电极片状压电致动器——(二)位移特性及狭缝宽度对其影响的实验研究  

Split Electrode In plane Bending Piezoelectric Actuators: (Ⅱ)Experiment Investigations on Deflection Characteristics and the Effect of the Crevice Width on It

作　　者：王志宏[1] 王三红[1] 张良莹[1] 姚熹[1] 

机构地区：[1]西安交通大学电子材料与器件研究所

出　　处：《压电与声光》1998年第6期385-388,共4页Piezoelectrics & Acoustooptics

基　　金：高等学校博士学科点专项科研基金

摘　　要：研究了悬臂梁式分割电极片状压电致动器的位移特性。理论分析表明，分割电极狭缝宽度会减小致动器自由端的位移输出，但当狭缝宽度小于致动器电极宽度的１０％时，可忽略狭缝宽度的影响。致动器端部位移的测试结果大于理论计算值。与现有磁头悬浮臂尺寸相近的致动器，在２０Ｖ～５０Ｖ的电压驱动下均可获得１μｍ～２μｍ的致动位移。对９８５０道／厘米的密度磁盘，该位移能覆盖至少一个磁道宽度，满足磁头定位两级伺服系统对第二级致动器位移的基本要求。Displacement characteristics of a cantilever split morph piezoelectric actuator have been investigated. Theoretical analysis indicated that the tip displacement of free top will be decreased with increasing of the crevice with between two pairs of symmetric electrodes. Nevertheless, the effect of crevice width on tip displacement can be ignored when its width is less than 10 percent of the electrodes width. The measured result of tip displacement is larger than the value of theoretical analysis. The tip displacement of 1 to 2 μm can be achieved at 20 V to 50 V driving voltage for the split electrode which size is simlar to that of existing suspension. As to high track density hard disk drives with 9 850 tracks per centometer, this actuating stroke can cover at least one track width and meet the primary requirements of dual stage head positioning servo system for displacement of secondany actuator.

关 键 词：致动器 压电陶瓷 分割电极 端部致动位移 磁盘 

分 类 号：TM282.06[一般工业技术—材料科学与工程] TP333.35[电气工程—电工理论与新技术]