基于激光多普勒效应的MEMS的运动检测  

Dynamic testing of MEMS based on laser doppler effect

作　　者：侯世博[1] 李醒飞[1] 贺少辉[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072

出　　处：《传感器与微系统》2009年第10期106-107,120,共3页Transducer and Microsystem Technologies

摘　　要：提出了一种可以测量微机电系统(MEMS)面内瞬时速度和位移的测量系统。该系统利用差动激光多普勒效应,采用了频移技术和接收端的滤波技术将带有MEMS运动信息的光信号接收并解调,然后,利用LabVIEW和Matlab软件对采集的信号进行数字滤波和时频分析,从而得到被测器件的运动参量,为研究MEMS的动态特性提供了准确可靠的方法。A system for testing transient velocities and displacements of MEMS is proposed. The system is based on differential laser Doppler effect. Frequency shift technology and wave filtering technology are used to process the signal and software LabVIEW ＆ Matlab are used to measure its movement parameters with the mothed of digital filtering technology and time-frequency analysis. An accurate and reliable method can be provided for the research on dynamic characteristics of MEMS.

关 键 词：微机电系统 激光多普勒效应 时频分析 

分 类 号：TN247[电子电信—物理电子学]