Zr-Al-N及Zr-Al-Si-N复合膜的微结构及力学性能  

Microstructure and mechanical properties of Zr-Al-N and Zr-Al-Si-N composite films

作　　者：靳树强[1] 董松涛[1] 尤建飞[1] 喻利花[1] 许俊华[1] 

机构地区：[1]江苏科技大学材料科学与工程学院江苏省先进焊接技术重点实验室,江苏镇江212003

出　　处：《金属热处理》2009年第10期12-16,共5页Heat Treatment of Metals

基　　金：国家自然科学基金项目(50574044);江苏省自然科学基金(BK2008240)

摘　　要：采用多靶反应磁控溅射技术制备不同Al含量的Zr-Al-N复合膜及不同Si含量的Zr-Al-Si-N复合膜。采用能谱仪、X射线衍射仪和显微硬度计对薄膜进行测试,研究Al含量对Zr-Al-N复合膜微结构和力学性能的影响以及Si含量对Zr-Al-Si-N复合膜微结构和力学性能的影响。结果表明,当Al含量为13.97at%时,Zr-Al-N复合膜的硬度达到最大,最大值为27.16 GPa,随着Al含量的继续增加,薄膜由B1(NaCl型面心立方结构)型结构向B1-B4(ZnS型纤锌矿结构)型双相结构转变,硬度急剧降低;当Si含量为18.79at%时,Zr-Al-Si-N复合膜的硬度达到最大,最大值为34.43 GPa,进一步增加Si含量薄膜向非晶态转化,薄膜硬度降低。A series of Zr-Al-N composite films with different Al contents and a series of Zr-Al-Si-N composite fihus with different Si contents were prepared by multi-target reactive magnetron sputtering. The films were surveyed with energy dispersive spectroscopy, X-ray diffraction and microhardness tester. The effects of Al content on microstructure and mechanical properties of the Zr-Al-N composite films and the effects of Si content on the microstructure and mechanical properties of Zr-Al-Si-N composite films were studied. The results show that the maximum hardness of the Zr-Al-N composite films reaches 27. 16 GPa when Al content is 13.97at%. The hardness of the Zr-Al-N composite films decreases rapidly due to the structure of the films changed from B1 to B1-B4 as further increase of Al content. In the Zr-Al-Si-N composite films,the hardness reaches 34.43 GPa when Si content is 18.79at%. With further increasing Si content, crystalline Zr-Al-Si-N composite films turnes into amorphous and the hardness of the films decreases.

关 键 词：Zr-Al-N复合膜 Zr-Al-Si-N复合膜 微结构 显微硬度 反应磁控溅射 

分 类 号：TG174.444[金属学及工艺—金属表面处理]