衬底温度对AZO/Cu/AZO多层薄膜结构及光电特性的影响  

INFLUENCE OF SUBSTRATE TEMPERATURE ON THE SRUCTURAL,OPTICAL AND ELECTRICAL PROPERTIES FOR AZO/Cu/AZO MULTILAYER FILMS

作　　者：杨田林[1,2] 张之圣[1] 宋淑梅[2] 李延辉[2] 吕茂水[2] 韩圣浩[2] 庞智勇[3] 

机构地区：[1]天津大学电子信息工程学院,天津300072 [2]山东大学威海分校空间科学与物理学院,威海264209 [3]山东大学物理学院,济南250100

出　　处：《太阳能学报》2009年第9期1209-1213,共5页Acta Energiae Solaris Sinica

基　　金：国家自然科学基金(60676041);山东省自然科学基金(Y2008A37)

摘　　要：采用射频磁控溅射和离子束溅射联合设备在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的AZO/Cu/AZO多层薄膜。研究了衬底温度对薄膜的结构和光电特性影响。X射线衍射谱表明AZO/Cu/AZO多层薄膜是多晶膜,AZO层具有六角纤锌矿结构,最佳取向为(002)方向,Cu层具有立方结构。当三层薄膜制备过程中,衬底始终加热,衬底温度为100℃时,制备的薄膜具有最高的品质因子2.26×10^(-2)Ω^(-1),其方块电阻为11Ω·□^(-1),在波长500～800nm范围内平均透过率达到了87%。当制备靠近衬底的AZO层,衬底才加热时,发现衬底温度为250℃时,制备的多层薄膜光电特性最优,其方块电阻为8Ω·□^(-1),平均透过率为86%。The influence of substrate temperature on the structural, optical and electrical properties for AZO/Cu/AZO multilayer films has been investigated. X diffraction spectra indicated that the AZO/Cu/AZO multilayer films are polycrystalline consisting of two AZO layers with the ZnO hexagonal structure having a preferred orientation of （002） and a Cu layer with the cubic structure. The multilayer film with a highest merit figure of 2.26×10^-2Ω^-1, sheet resistor of 11Ω·□^-1 and an average transmittance of 87 % in the wavelength range of 500-800nm has been obtained at a substrate temperature of 100℃. A good transparent conductive multilayer film with a high merit figure, lowest sheet resistor of 8Ω·□^-1 and an average transmittance of 86% has been obtained at a substrate temperature of 250℃ during the preparation of the bottom layer near the substrate only.

关 键 词：AZO 多层薄膜 离子束溅射 透明导电膜 

分 类 号：TK513.2[动力工程及工程热物理—热能工程]