不同衬底上氧化锌薄膜的金属有机化学气相沉积方法生长(英文)  

Growth of ZnO Films on Different Substrates by Metal Organic Chemical Vapor Deposition

作　　者：王超[1] 杨小天[1,2] 唐魏[1] 赵春雷[1] 杨佳[1] 高晓红[1] 李香萍[3] 高忠民[4] 杜国同[3] 

机构地区：[1]吉林建筑工程学院电气与电子信息学院,吉林长春130021 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [3]吉林大学电子科学与工程学院,吉林长春130012 [4]吉林大学化学学院,吉林长春130012

出　　处：《液晶与显示》2009年第5期666-669,共4页Chinese Journal of Liquid Crystals and Displays

基　　金：Supported by NCET(No.05-0326);NSFC(No.60576054,60576043,60576056,60876013);Project of Chang-chun Science and Technology Plans(No.2006303);Project of Ministry of Construction P.R.China and Department of Education of Jilin Province

摘　　要：氧化锌薄膜通过金属有机化学气相沉积方法生长在康宁玻璃与α-蓝宝石衬底上,研究了有关薄膜的生长质量与发光特性。通过X光衍射方法测试研究发现,不仅在以α-蓝宝石为衬底的样品中,同时,在以玻璃为衬底的样品中都发现了氧化锌(002)方向生长的尖峰,表明生长在两种衬底上的样品都是高度的C向生长。对两种样品的荧光谱研究发现,两者的紫外峰位于374nm附近,在以α-蓝宝石为衬底的样品中,有深能级发射,但在以玻璃为衬底的样品中没有发现,表明在玻璃衬底上我们生长出了高质量的氧化锌薄膜。通过原子力显微镜,对生长在两种衬底上薄膜的表面形貌做了观察,其晶粒的大小与表面粗糙度有一定的差别,表明二者都是以柱状形式生长的。ZnO thin films were grown on two kinds of substrates of Corning glass and α-Al2O3 by metal organic chemical vapor deposition. The properties of the films were studied. It was found the sharp diffraction peak for ZnO （002） by X-ray diffraction method, not only in the sample of the substrate of α-Al2O3（A）, but also in the sample of the substrate of Corning glass（B）, showing the two samples were highly c-axis oriented. The photoluminescence （PL） spectra of the ZnO films were studied. The UV emission at ~374 nm was found in sample A and B. The deep level enfissions was found in the sample A, but not in the sample B, showing that the high quality ZnO films was grown on the substrate of glass. The surface morphology was studied by the AFM also. Though the average size of grain and the RMS（root-mean square） value of the two samples is different, comparing sample A with B, the result shows that sample A is more smooth. It can be found that the samples A and B were all grown in a column by-column growth process.

关 键 词：氧化锌 薄膜 生长 MOCVD 

分 类 号：TN304.21[电子电信—物理电子学]