光通信C波段硅基导模共振窄带滤波器的模拟  

Simulation of Silicon-based Guided-mode Resonant Grating Filters with Narrow Bandwidth for C-band Optical Communication

作　　者：郭剑川[1] 左玉华[1] 张岭梓[1] 张云[1] 丁武昌[1] 成步文[1] 余金中[1] 王启明[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083

出　　处：《半导体光电》2009年第5期663-668,共6页Semiconductor Optoelectronics

基　　金：国家重点基础研究计划项目(2006CB302802;2007CB613404);国家高技术研究发展计划项目(2006AA03Z415)

摘　　要：结合严格耦合波理论和遗传算法对C波段硅基导模共振滤波器进行了模拟分析。从模拟结果出发详细讨论了光栅周期、填充因子、光栅深度和入射角度对滤波器反射特性的影响。导模共振对光栅周期、填充因子、光栅深度和入射角度都有很高的敏感性,利用这一特点可以设计性能优异的硅基滤波器件。导模共振滤波器的共振波长峰值反射率达到了98.9%,峰值半高宽小于密集波分复用(DWDM)0.8nm的要求。Simulated are silicon-based guided-mode resonant grating filters with narrow bandwidth for C-band optical communication. The effects of the characteristics of grating period, fill factor, the grating depth, the thickness of SiO2 layer and incident angle on the reflection mechanisms of the filters are analyzed in detail based on the simulation results. Guided-mode resonant effect is very sensitive to such characteristics, which can be used to optimize siliconbased filters. The reflectance of the resonant wavelength of this filter reaches 98. 9%, and the FWHM （full width at half maximum） is less than 0. 8 nm limited by the DWDM （dense wavelength division multiplication） system.

关 键 词：导模共振 滤波器 介质光栅 硅基 严格耦合波理论 

分 类 号：TN25[电子电信—物理电子学]