高纯电子化学品技术研发现状及必须解决的基本问题  

Must Be Solved Basic Problems in Research of Superpure Electronic Chemicals

作　　者：赵海燕[1] 李德高[1] 

机构地区：[1]云南省化工研究院,云南昆明650228

出　　处：《云南化工》2009年第5期27-31,共5页Yunnan Chemical Technology

摘　　要：目前电子产业对高纯电子化学品的质量要求非常高,其生产技术由国外发达国家垄断,国内使用的高纯电子化学品几乎全部依赖进口。因此,必须依靠自己的科研力量进行技术开发。在技术研发过程中必须解决一些最基本问题,比如没有高投入高精密试验和分析设施,不可能开展高纯电子化学品的试验研究。The quality standard request for superpure electronic chemicals is very high. The performance technology was controlled by the developed countries, so almost all of the superpure electronic chemicals used in domestic factories are imported. Therefore we must develop our technology. During this research, some basic problems such as unsufficient financial support and low precision experiment study with low precision analysis equipments must be solved.

关 键 词：高纯电子化学品 电子级磷酸 金属离子 

分 类 号：TQ126.35[化学工程—无机化工]