金刚石镶嵌非晶碳膜表面形貌对场致电子发射的影响  

INFLUENCE OF SURFACE MORPHOLOGIES OF FIELD ELECTRON EMISSION FROM CVD DIAMOND AMORPHOUS CARBON FILMS SURFACES

作　　者：王小平[1,2] 姚宁[1,2] 李运钧[1,2] 何金田[1,2] 张兵临[1,2] 

机构地区：[1]郑州大学物理系及河南省基础及应用科学研究所 [2]郑州航空工业管理学院应用科学系

出　　处：《发光学报》1998年第3期267-271,共5页Chinese Journal of Luminescence

基　　金：863计划新材料领域资助

摘　　要：用微波等离子体化学气相沉积设备，在经过不同研磨预处理的金属钼衬底上沉积出了表面形貌有较大差异的金刚石镶嵌非晶碳膜，分别用扫描电子显微镜（ＳＥＭ）、金相显微镜和Ｘ射线衍射谱（ＸＲＤ）以及Ｒａｍａｎ光谱对样品进行了分析测试．研究了各样品的场致电子发射特性，结果发现薄膜表面由大量镶嵌有金刚石小晶粒的非晶碳球组成，在我们的实验范围内，薄膜表面非晶碳球尺寸越小。Diamond films with various surface morphologies were obtained, which were deposited on pretreated molybdenum by microwave plasma assisted chemical vapor deposition system. The films were characterised by X ray diffraction (XRD), Raman spectrum, optical microscopy and scanning electron microscopy(SEM). The result of expe riment indicates that diamond films with ball like graphitic surface morohologis, which consisted of diamond nulei, were obtained. By investigating electron emission of the diamond amorphous carbon films, we found that the lower of the size of the ball like graphitics in diamond amorphous carbon thin films the most efficient of electron emission.

关 键 词：金刚石镶嵌 非晶碳膜 场致电子发射 薄膜 

分 类 号：TN304.18[电子电信—物理电子学] O484.4[理学—固体物理]