硫化锌基底可见-红外多波段的光学薄膜  

Multi-band visible and IR optical film on ZnS substrate

作　　者：付秀华[1] 孙钰林[1] 贺才美[1] 董洁凌[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《红外与激光工程》2009年第5期803-806,共4页Infrared and Laser Engineering

基　　金：长春市科技计划项目(262720)

摘　　要：由于硫化锌（ZnS）晶体透光区域较宽,常被用于多波段可见与红外光学系统中。介绍了在ZnS基底上制备的多波段光学薄膜,在400-700nm的可见波段及8-12μm的中长波红外波段实现高透射率,在1064nm及1540nm两点实现高反射率,其入射角度为45°。选取了ZnS和YbF3作为高低折射率材料,设计并通过软件优化出合理的膜系,采用电子枪离子辅助沉积系统进行镀制。该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求。这对于红外光学系统的应用具有极其重要的意义。ZnS crystal is usually used in multi-band visible and IR optical systems because of its wide transmission wavelength region. The preparation of multi-band optical film on a ZnS substrate was mainly introduced. At incident angle of 45°, high transmittance over visible band from 400 nm to 700 nm and middle-long wavelength IR band from 8 μm to 12 μm, high reflectivity at the two wavelengths of 1 064 nm and 1 540 nm were implemented. ZnS and YbF3 were respectively used as high and low refraction index material. The proper film was designed and optimized with software. The thin film was deposited with IBS. The deposited coating can endure the environmental tests such as rain pour, salt fog, and high and low temperature etc. and meet its practical requirement. It has important significance for the application of infrared optical systems.

关 键 词：光学薄膜 红外增透膜 离子辅助沉积 牢固度 

分 类 号：O484[理学—固体物理]