SOI压力传感器及其应用  

SOI Sensor and Its Application

作　　者：孙克[1] 吕艳[1] 张东旭[1] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043

出　　处：《仪表技术与传感器》2009年第B11期398-400,405,共4页Instrument Technique and Sensor

基　　金：国家重点基础研究发展计划资助(973)(2009CB3200300);中国高技术研究发展计划(863)(2007AA042104)

摘　　要：SOI压力传感器是一种新型的、先进的物性型压力传感器。其采用硅氧化物实现压力芯片的敏感元件和与基片之间的电隔离,替代传统的pn结电隔离技术,打破极限使用温度上限的局限性,不存在微漏电通道,保障在高温条件下长期稳定工作。SOI压力传感器可广泛应用于石油、化工、冶金、航天、航空、船舶等领域的高温压力检测,极好地解决了高温传感器性能指标稳定性差,高低温宽温区的性能兼容性和分散性较大,环境试验适应性差、寿命短和可靠性低等技术难题。SOI pressure sensor is a new, advanced type pressure sensor properties. Its use of silicon oxide to achieve the pressure sensor chip and the substrate between the isolation, an alternative to traditional PN junction isolation technology, breaking the limits of the limitations of the use of the temperature limit, there is no channel micro-leakage, high temperature and under the conditions of protection long-term stability. SOI pressure sensors can be widely used in petroleum, chemical, metallurgy, aerospace, aviation, ships and other areas of high temperature pressure testing, an excellent solution to the high temperature stability of poor sensor performance, high-performance low-temperature zone temperature compatibility and dispersion than the large, poor adaptability of environmental testing, reliability and low life expectancy is very short and the technical difficulties.

关 键 词：SOI 传感器 工艺 应用 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]