创新性近代物理实验教学——AZO薄膜的制备及其表征  

Experiment Teaching of Innovative Modern Physics Experiment——Preparation and Characterization of AZO Thin Film

作　　者：吕建国[1,2] 孙兆奇[2] 朱剑博[1] 宋学萍[2] 

机构地区：[1]合肥师范学院物理与电子工程系,安徽合肥230061 [2]安徽大学物理与材料科学学院,安徽合肥230039

出　　处：《合肥师范学院学报》2009年第6期32-35,共4页Journal of Hefei Normal University

基　　金：国家自然科学基金(No.50872001);教育部博士点专项基金(No.20060357003);安徽省人才专项基金(No.2004Z029);安徽科技厅重点项目(No.07020203009);安徽省高等学校省级自然科学研究项目(No.KJ2007B135);安徽省高等学校青年教师科研资助计划项目(No.2006jql192);安徽大学人才队伍建设基金资助课题

摘　　要：介绍了创新性近代物理实验sol-gel法制备AZO薄膜的实验原理和不同Al掺杂量ZnO薄膜的制备过程,用X射线衍射仪和紫外-可见分光光度计测试了AZO薄膜的微结构和光学性质。测试结果表明:随着Al掺杂量的增加,AZO薄膜的结晶度提高,吸收边发生蓝移,光学带宽Eg从3.279减小3.216eV。实验教学结果显示:将科研项目开设为创新性学生实验,教学效果良好,激发了学生对实验的学习兴趣,培养了学生的创新意识和综合能力。The experimental principle and processes of preparation of AZO thin films by sol-gel method, an innovative experiment of modern physics, have been discussed in details. Microstructure and optical property of AZO thin films are characterized by X-Ray diffractometer and UV-Vis spectrophotometer. The results indicate that as AI doping concentration increases, the crystalline degree increases, absorption edge shifts to shorter wavelength, and optical band gap increases from 3. 279 to 3. 216eV. The teaching results of the innovative experiment from scientific research project show that the experiment teaching achieves better teaching effect, stimulates the students to do experiments out of interests and arouses the students＇ innovative consciousness and their comprehensive research abilities.

关 键 词：创新性实验教学 sol--gel法 近代物理实验 AZO薄膜 

分 类 号：O766[理学—晶体学]