石英玻璃抛光质量对腐蚀形貌的影响  

Influence of Polishing Quality to Etching Morphology for Quartz Glasses

作　　者：邵竹锋[1] 王慧[1] 孙元成[1] 

机构地区：[1]中国建筑材料科学研究总院,北京100024

出　　处：《武汉理工大学学报》2009年第22期133-136,共4页Journal of Wuhan University of Technology

基　　金：军工科研(YT-26)

摘　　要：抛光后的石英玻璃表面光滑、平整,经过HF酸腐蚀后表面形貌变得凹凸不平。为了解释该现象,从Weyl的亚表面理论着手,借助研磨、抛光破坏层模型和微裂纹扩展模型,详细阐述了微裂纹的存在、扩张机理。研磨、抛光后亚表面的微裂纹被认为是造成腐蚀形貌变坏的主要原因。通过不同时间抛光后的腐蚀形貌对比试验证实了该理论和模型。Polished quartz glasses have good morphology, which will become rough after being etched in HF acid. To explain this phenomenon, sub-surface theory from Weyl is used, and destructive layer model and micro-cracks＇ expending model are built. The existent and growing mechanism of micro-cracks can be explained with the theory and double models. Micro-cracks of sub-surface caused by grinding and polishing are regarded as the primary reason to destroy the good morphology after etching. The theory and models are testified by contrasting the etching morphology after polishing different time.

关 键 词：石英玻璃 抛光 腐蚀 

分 类 号：TQ171.731[化学工程—玻璃工业]