基于Kohonen神经网络的晶圆光刻流程动态调度方法  

Dynamic Scheduling of Photolithography Process Based on Kohonen Network

作　　者：蒋舒宇[1] 周炳海[1] 潘尔顺[1] 

机构地区：[1]上海交通大学机械与动力工程学院,上海200240

出　　处：《上海交通大学学报》2009年第11期1788-1793,共6页Journal of Shanghai Jiaotong University

基　　金：国家自然科学基金资助项目(60574054)

摘　　要：由于半导体晶圆制造过程的复杂性,使得实时控制过程难于实施.针对光刻区的不同状态,提出一种基于Kohonen神经网络的多策略实时调度方法,以适应生产过程中的复杂变化.仿真结果表明,该调度方法是有效可行的.Semiconductor enterprises should continue to provide more capacity to meet the demand of the highly competitive semiconductor market. The complicacy of semiconductor manufacturing process makes it hard to implement real-time scheduling. To some extend, photolithography area controls the performance of whole semiconductor fabrication. A multi-strategy real-time scheduling method based on Kohonen network was proposed to accommodate the complex change of state in photolithography area. The result of simulation of a semiconductor manufacturing system improves that the proposed method is effective and feasible.

关 键 词：半导体晶圆制造系统 光刻 KOHONEN网络 动态调度 

分 类 号：TP278[自动化与计算机技术—检测技术与自动化装置]