微面形貌观测物镜的光学系统误差分析  

Error Analysis of Optical Micro-structure Inspection System

作　　者：宋霄[1,2] 刘娜[1,2] 井文才[1,2] 贾大功[1,2] 张红霞[1,2] 张以谟[1,2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津大学光电信息技术科学教育部重点实验室,天津300072

出　　处：《光子学报》2009年第11期2989-2992,共4页Acta Photonica Sinica

基　　金：国家自然科学基金(60577013);新世纪优秀人才支持计划资助

摘　　要：提出了一种非接触内窥式微面形貌探测镜,分析了其光学系统的装配误差对实际成像位置的影响.利用几何光学原理,计算了三种装配误差与实际成像位移之间的关系.给出了满足CCD成像分辨率要求的位置调整范围,推导出透镜的装配误差范围,达到成像清晰、系统分辨率高的目的.A micro-profile zoom endoscope system is proposed.The position error of image plane caused by the assembly error of the system was analyzed.The relationship between the three kinds of assembly errors and the actual position of image plane were calculated using the principle of geometric optics respectively.The adjustable range of the CCD position was presented,and then the range of the lens assembly error was calculated.It is ensured that optimized system is available due to clear image and improved resolution of the system.

关 键 词：微面形貌观测物镜 光学系统 装配误差 分辨率 

分 类 号：TH742[机械工程—光学工程]