Assessment method of numerical integration used in measuring profile based on ultra-precise thin light beam scanning  

作　　者：郎治国 谭久彬 

机构地区：[1]Center of Ultra-Precision Optoelectronic Instrument,Harbin Institute of Technology

出　　处：《Optoelectronics Letters》2009年第6期476-480,共5页光电子快报（英文版）

基　　金：supported by the National Natural Science Foundation of China (No.60878028)

摘　　要：In order to improve the precision of profile measurement based on ultra-precise thin light beam scanning,an assessment method that compares different numerical integration algorithms in frequency-domain is put forward.The compared numerical integration methods are regarded as recursive digital filters.Through comparing their functions of frequency response in frequency-domain,the delivering role of noise with different frequencies can be analyzed directly and clearly in the process of integrating measured slope data.Analyzing results show that the method of cubic spline is better than trapezoidal,Simpson and 3/8 Simpson rules.In order to improve the precision of profile measurement based on ultra-precise thin light beam scanning, an assessment method that compares different numerical integration algorithms in frequency-domain is put forward. The compared numerical integration methods are regarded as recursive digital filters. Through comparing their functions of frequency response in frequency-domain, the delivering role of noise with different frequencies can be analyzed directly and clearly in the process of integrating measured slope data. Analyzing results show that the method of cubic spline is better than trapezoidal, Simpson and 3/8 Simpson rules.

关 键 词：数值积分 光束扫描 评估方法 轮廓测量 超精密 文件 数字滤波器 积分算法 

分 类 号：TN873.93[电子电信—信息与通信工程]