基于激光剪切干涉的长导轨直线度测量系统设计  

Design of long guide alignment measurement system based on laser shearing interference

作　　者：王文丹[1] 赵美蓉[1] 付鲁华[1] 刘启海[1] 林玉池[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感器与微系统》2009年第12期77-79,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60874106)

摘　　要：针对长导轨直线度传统测量方法中存在的问题,研制了一种基于激光楔形平板剪切干涉测量的便携式激光干涉准直系统。根据剪切干涉测量原理,设计了光学元件的关键参数。在ARM9硬件开发平台下使用嵌入式操作系统WINCE 5.0,通过Embedded C++实现了导轨直线度误差值等的相关算法。系统实时计算相邻信号之间的相位差,简化了激光光束准直度调校测量设备的装调工作;根据信号幅值大小控制信号增益,实现精确检测大尺寸导轨直线度误差的功能。整个系统测量精度高,集成度高,便携性强,可应用于各种工业环境与室外测量。To deal with the shortage of the traditional linearity measurement of long distance, a portable laser shearing interference alignment system is developed. Key parameters of the measuring elements are designed based on wedge plate shearing interference. Using ARM9 processor as the developing platform of the hardware, the algorithm about linear error valuation of long guide is designed by Embedded C ＋＋ under the embedded operating system WINCE 5.0. With the real-time calculation of phase difference between adjacent signal, Laser-beams＇ collimation calibration and equipments＇ assembling adjusting are well simplified. The signal gain is adjusted according to the amplitude, the long distance measurement function is realized. The system composed with ARM9 processor has low power dissipation, high accuracy and high integration level. It provides convenience for measurement at industrial environment and outdoors.

关 键 词：激光准直 剪切干涉 楔形平板 直线度误差 

分 类 号：TH741[机械工程—光学工程]