气体声表面波传感器的研究进展  

Progress of SAW Gas Sensors

作　　者：李昊峰[1] 贾锐[1] 李维龙[1] 陈晨[1] 刘明[1] 

机构地区：[1]中国科学院微电子研究所,北京100029

出　　处：《微纳电子技术》2009年第12期715-719,738,共6页Micronanoelectronic Technology

基　　金：百人计划;国家自然科学基金(60676001);国家自然科学基金(60706023);973项目(2009CB939703)

摘　　要：主要从声表面波(SAW)结构和敏感膜的角度综述了SAW气体传感器的研究现状。重点分析了国外出现的换能器新型结构,对其优点进行了初步分析,并和传统的SAW气体传感器结构做了比较,指出这些新结构尽管存在一些缺点,目前还不能取代传统的通用式结构,但是在某些特殊场合具有传统结构所不具备的优点。在敏感膜方面,主要从新材料方面入手,分析了目前主要使用的敏感膜材料,并结合SAW气体传感器的发展趋势,总结出敏感膜的发展方向。同时,对SAW气体传感器的其他组成部分如衬底材料和信号处理电路也作了简单的回顾,最后结合国内外研究成果对SAW气体传感器的发展做了展望。The progresses of SAW gas sensors are described on the structure of the surface acoustic wave and the sensitive films. The new structures of foreign transducers and their advantages are analyzed, and are compared with the traditional structures of the transducers. The new structures are not perfect enough to replace the traditional structures, but the new structures have irreplaceable advantages at some specific applications. The new materials of the sensitive films are analyzed, and the development directions of the sensitive films are presented combining with the development trends of SAW gas sensors. The other parts of the SAW sensors, such as the substrates and the signal processing circuits, are briefly reviewed. Based on the research results at home and abroad, the developments of the SAW gas sensors are prospected.

关 键 词：声表面波 气体传感器 换能器 插入损耗 敏感膜 有机聚合物 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]