声表面波谐振器传播状态的ANSYS仿真  

ANSYS Simulation on the Dissemination State of SAW Resonators

作　　者：陈营端[1,2] 高杨[2,3] 白竹川[4] 刘婷婷[1] 

机构地区：[1]西南科技大学信息工程学院,四川绵阳621010 [2]中国工程物理研究院电子工程研究所,四川绵阳621900 [3]重庆大学光电技术及系统教育部重点实验室,重庆400044 [4]西南科技大学制造科学与工程学院,四川绵阳621010

出　　处：《微纳电子技术》2009年第12期739-743,749,共6页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题(2008A0403016);教育部访问学者基金资助项目(无编号)

摘　　要：为描述声表面波的传播状态,利用ANSYS软件对声表面波(SAW)谐振器进行了仿真。在对声表面波产生机理和SAW谐振器工作原理分析的基础上,建立了SAW谐振器仿真模型,讨论了网格划分不同对仿真结果精度的影响,得出了在每个SAW波长尺寸内划分30～40个网格可以得到较精确的仿真结果。对不同长度声孔径的声表面波谐振器进行了仿真分析,得出了声表面波只在固体表面1～2个波长深度范围内传播的仿真效果图,与理论分析有很好的一致性。最后对IDT/ZnO/金刚石/Si结构的声表面波器件进行了仿真,得出该结构声表面波器件SAW传播速度与ZnO的厚度成反比,其大小是IDT/ZnO结构器件SAW传播速度的2～3倍。The SAW resonator was simulated by ANSYS software to describe the dissemination state of the surface acoustic wave （SAW）. Based on analysis of the SAW generated mechanism and working principle of SAW resonators, the simulation model of SAW resonators was established. The effect of the different meshes on the accuracy of simulation results was discussed. The simulation results show that more accurate results can be obtained in each size range of wavelength with 30-40 grids. The SAW resonators with different long acoustic apertures were analyzed, the simulation effect diagram of only 1 - 2 wavelength dissemination depth of SAW in the solid surface was gotten. The result is consistent with the theoretical analysis. The SAW devices with IDT/ZnO/Diamond/Si structures were simulated. The results show that the SAW propagation velocity is inversely proportional to the thickness of ZnO, and is 2 - 3 times that of the SAW devices with IDT/ZnO structures.

关 键 词：RF MEMS SAW谐振器 叉指换能器(IDT) ANSYS软件 建模与仿真 

分 类 号：O422[理学—声学] TN712[理学—物理]