基于可靠性分析的真空镀膜机控制系统研究  

A Study of Vacuum Coating Machine Control System Based on Reliability Analysis

作　　者：丁雪成[1] 吴丽颖[2] 冯震宇[2] 张鸿年[2] 

机构地区：[1]西南交通大学电气工程学院,成都610031 [2]北京北仪创新真空技术有限责任公司,北京102600

出　　处：《北京联合大学学报》2009年第4期35-38,57,共5页Journal of Beijing Union University

摘　　要：通过对真空镀膜机的故障树分析,找出影响整个系统的薄弱环节,为控制系统可靠性设计提供参考。结合镀膜工艺流程,对控制系统软、硬件进行了论证分析和相应的设计,实现了以PLC为核心的真空镀膜机控制系统。该控制系统具有手动/自动控制、故障报警等功能,最终生产实践证实了该系统的可行性和可靠性,满足了工艺要求。In order to resolve the problem of the inconvenience in access and control existing in distributed components, a distributed component library system is designed and implementd. The feasibility of the introduction of SOA into the distributed component library system is analyzed. By studying J2EE＇s support to SOA, J2EE Web Service, J2EE fourarchitecture based on SOA is designed. J2EE Web Service is used to package components or component library into service, and the external public interfaces are left for calling by the use of components, thereby heterogeneity of distributed components is shielded. It has a theoretical and practical significance.

关 键 词：真空镀膜机 可靠性 故障树分析法 PLC 

分 类 号：TB368.5[一般工业技术—材料科学与工程]