压电微电机之综述  

Investigation to Piezoelectric Micromotor

作　　者：包定华[1] 闻敏[1] 顾豪爽[1] 邝安祥[1] 

机构地区：[1]湖北大学压电陶瓷技术研究所

出　　处：《微特电机》1998年第5期40-43,共4页Small & Special Electrical Machines

摘　　要：利用压电薄膜的低温沉积工艺与微机械加工技术结合可以制作出压电微电机。这种压电微电机在医用微型器械，自聚焦系统，精密微定位、微型机器人等领域有着重要应用。本文介绍了几种压电微电机的制作过程、结构、工作原理及有关结果，并指出了目前存在的问题和下一步研究发展的方向。Piezoelectric thin film micromotor has important applications in some fields such as medicalused microdevices, micropositioning, microrobots. The fabricating procedure, structure, operating principle and some related results of several piezoelectric micromotors were introduced in this paper. The advantages of the piezoelectric micromotors over other types of micromotors were pointed out. Existing problems and future development were discussed.

关 键 词：压电薄膜 压电微电机 压电材料 微电机 电机 

分 类 号：TM22[一般工业技术—材料科学与工程] TM380[电气工程—电工理论与新技术]