高分辨率双频激光回馈的位移测量方法  

Dual-Frequency Laser Optical Feedback Displacement Measurement System with High Resolution

作　　者：张立[1] 吴云[2] 周鲁飞[2] 张书练[2] 

机构地区：[1]北京交通大学理学院,北京100044 [2]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《北京交通大学学报》2009年第6期9-12,共4页JOURNAL OF BEIJING JIAOTONG UNIVERSITY

基　　金：国家自然科学基金资助项目(60827006)

摘　　要：在分析双频激光回馈测量原理的基础上,提出了一种基于双频激光回馈原理的高精度位移测量方法,研究了双频激光回馈的基本现象并给出了理论依据,进一步在回馈光学系统基础上,对两路正交的光回馈条纹,利用电路进行细分处理:即5细分和4倍频电路相结合,细分产生的计数脉冲最后送入单片机进行计算及显示.采用可编程逻辑器件FPGA和单片机设计信号处理电路,利用FPGA实现4倍频细分,利用电阻链细分实现5细分.全部电路通过逻辑、时序仿真,验证了本方法的可行性.目前此系统可满足高精度位移测量的要求.A high-resolution displacement measurement system based on weak feedback effect of birefringence dual frequency lasers has been presented and demonstrated. The experimental setup of an optical feedback dual-frequency laser is developed by using the phase delay between the optical feedback fringes of the two orthogonally polarized lights to realize displacement division and direction discrimina- tion. A concise theory is given to explain this experimental result. The sub-circuit is mainly composed of the 5-division ASIC, and the FPGA which is used to realize the signal 4-division. A novel displacement apparatus with a resolution of being as high as 15.8 nm, as well as the function of direction discrimination, can meet the demand of high-precision measurement.

关 键 词：位移测量 双频激光 光回馈 细分 

分 类 号：TB921[一般工业技术—计量学]