一种结构简单的高精度压电尺蠖式位移致动器  

A Precision Inchworm-Type Piezoelectric Actuator with Simple Structure and Easy Assembly Feature

作　　者：王丽娜[1,2] 刘俊标[1] 郭少鹏[1] 韩立[1] 

机构地区：[1]中国科学院电工研究所,北京100190 [2]中国科学院研究生院,北京100049

出　　处：《微特电机》2009年第12期26-28,共3页Small & Special Electrical Machines

基　　金：国家自然科学基金资助项目(50607018)

摘　　要：介绍了一种结构简单、易装配的高精度压电尺蠖式位移致动器,阐述了致动器的工作原理和结构。致动器采用叠堆式压电陶瓷作为驱动,利用柔性铰链作为位移放大机构,能够可靠地实现光轴的双向运动。位移分辨率可以达到纳米级别,步距可以在几纳米至几毫米之间任意选择。A precision piezoelectric actuator was introduced,and its working principle and mechanical design were presented.Driven by laminated PZT and utilizing flexible hinge as clamp,this actuator could move back and forth freely,and the step could adjust from several nanometers to microns.The advantages could be featured with simple structure,easy assembly,convenient operation and control.

关 键 词：压电尺蠖式位移致动器 柔性铰链 纳米定位 

分 类 号：TM38[电气工程—电机]