一种高温绝压传感器弹性膜片技术研究  

The technology research of flexible film to high temperature absolute pressure sensor

作　　者：侯占民[1] 王金文[1] 杨金梅[1] 崔宏敏[1] 

机构地区：[1]中国电子科技集团公司第四十九研究所,哈尔滨150001

出　　处：《黑龙江大学自然科学学报》2009年第6期822-824,829,共4页Journal of Natural Science of Heilongjiang University

摘　　要：介绍了该高温绝压传感器的原理和特点,设计了传感器关键元件弹性膜片结构,制定了一套弹性膜片的制作工艺,使弹性膜片的加工工艺、热处理工艺有机地结合起来,弹性膜片金相组织和力学性能达到理想状态,解决了该传感器精度的关键技术,研制出一体化传感器在(-50～220)℃工作温度范围精度达到0.6%F.S。The of flexible diap principle and characteristics of high - temperature absolute pressure sensor are introduced. Structure hragm in key components of senser are designed. A set of processes are made for flexible diaphragm So that elastic membrance process and heat treatment process have been combined organically, and desired state of elastic membrance microstructure and mechanical property have been achieved. Key technologies for measurement accuracy has been solved. Integrated sensor which accuracy is 0. 6% F·S has been manufactured on （ - 50 220）℃ operation temperature range.

关 键 词：高温 绝压传感器 弹性膜片 

分 类 号：TP391[自动化与计算机技术—计算机应用技术]