椭圆偏振法研究B离子注入LiNbO_3光波导的光学特性  

Study on the Optical Properties of B-implanted Lithium Niobate Waveguide with Ellipsometry

作　　者：于晓红[1] 连洁[1] 卢霏[1] 宋平[1] 高尚[1] 

机构地区：[1]山东大学信息科学与工程学院,济南250100

出　　处：《人工晶体学报》2009年第6期1370-1374,共5页Journal of Synthetic Crystals

摘　　要：用椭圆偏振法研究了2.5 MeV B离子注入后的铌酸锂晶体,建立四层模型,对反射式椭圆偏振测量得出的数据进行反演拟合,得到了波导层厚度及0.3~0.8μm波段波导层和损伤层的双折射色散曲线,发现低剂量B离子注入铌酸锂形成了折射率下降的位垒,在晶体表面下2.0μm范围内得到了光波导结构。研究结果为以铌酸锂为基础的光波导器件研发提供了重要信息。2.5 MeV B ion-implanted lithium niobate crystal was studied by ellipsometry method. Data from the measurement were inversed to fit a moderate four-layer model for the crystal. The depth of waveguide layer and the refractive index dispersion in the range of 0.3-0.8 μm were obtained. Barrier of reduced refractive index was found . Waveguide structure was get from the crystal surface to the depth of 2.0 μm in the crystal. The results provided important information for the fabrication of waveguide devices.

关 键 词：光波导 椭圆偏振测量 离子注入 折射率 

分 类 号：O734[理学—晶体学]