钛扩散LiNbO_3晶体光波导长周期光栅  

Long-period gratings based on Ti-diffused lithium niobate waveguides

作　　者：谌贝[1] 王琴[2] 康田[2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]河南黄河河务局信息中心,郑州450004

出　　处：《光通信技术》2010年第1期12-14,共3页Optical Communication Technology

摘　　要：设计了一种钛扩散铌酸锂(LiNbO3)晶体光波导结构,并在该基础上制作了长周期光栅。使用两步钛扩散方法在Z切LiNbO3基片上制造了波导,它包括一个单模芯层和一个平面包层,之后用光刻胶光栅置于波导表面。实验证明用这种结构设计长周期波导光栅是可行的。对光波导制造工艺和波导结构的深入研究,为制作高速电光调制型光栅提供技术基础。A kind of Ti-diffused lithium niobate（LiNbO3） single-mode waveguide for the realization of long-pe- riod gratings was proposed, which consists of a channel core embedded in a thin slab cladding. The waveguide was fabricated on a z-cut LiNbO3 substrate with a two-step Ti-diffusion process and its suitability was demonstrated for grating application with a number of removable photoresist long-period gratings deposited on the waveguide surface. The waveguide fabrication process and the LiNbO3 waveguide structure could be further explored for the development of electrooptic gratings for high-speed applications.

关 键 词：铌酸锂 长周期光栅 光波导 钛扩散 

分 类 号：TN253[电子电信—物理电子学]