光栅回转式压电微角度执行器的研究  

Research on circular grating rotary piezoelectric micro-angle actuator

作　　者：张立[1] 林玉池[1] 赵美蓉[1] 齐永岳[1] 秦峰[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感器与微系统》2010年第1期58-61,共4页Transducer and Microsystem Technologies

基　　金：高等学校科技创新工程重大项目培育资金资助项目(708023)

摘　　要：介绍了一种基于圆光栅检测的回转式压电微角度执行器,采用尺蠖运动原理设计回转式压电电动机,运用C8051F005单片机产生四路控制信号,并采用直流放大式驱动电源放大控制信号驱动压电电动机,并通过圆光栅检测系统实时测量电动机联动盘回转角度,把测量值引入控制环节,实现最小步距为2.26"的全圆周匀速连续转动。A rotary piezoelectric micro-angle actuator based on detection of circular grating is introduced, a rotary piezoelectric motor is designed with the inchworm principle, and four-channel controlling signals are generated by C8051F005 single chip, amplified by DC amplifying type driving power, can drive the piezoelectric motor. A measuring system of circular grating is designed to measure the slewing angle of the motor, and the measurement is drawn into controlling unit,constant velocity continuous rotation is realized with smallest stepper angle of 2.26＂.

关 键 词：微角度 压电电动机 尺蠖运动 圆光栅 辨向细分 

分 类 号：TH712[机械工程—测试计量技术及仪器]