基于偏振移相的环路径向剪切干涉  

Cyclic Radial Shearing Interferometry Based on Polarization Phase-Shifting Technique

作　　者：孔梅梅[1,2] 高志山[1] 陈磊[1] 徐春生[1,3] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094 [2]南京邮电大学光电工程学院,江苏南京210046 [3]中兴通讯股份有限公司,江苏南京210012

出　　处：《光学学报》2010年第1期127-131,共5页Acta Optica Sinica

基　　金：国家自然科学基金(60678048)资助课题

摘　　要：只需要一幅干涉图就能得到被检波面信息的径向剪切干涉,适于动态波前的测量。将便于干涉图像处理的同步移相技术引入径向剪切干涉中,基于环路径向剪切干涉,利用一个正交的二维光栅分光,采用偏振移相法,能同时得到相移间隔π/2的四幅移相干涉图。运用传统的四步移相算法,结合波面迭代算法复原波面。通过理论公式的推导、计算机的模拟分析,以及初步的实验测试,验证了偏振移相应用于径向剪切干涉的可行性,模拟结果显示均方根精度优于λ/100。具有抗振特点的光栅分光偏振移相的同步移相方案,不仅能够克服剪切干涉的单幅干涉图处理复杂的缺点,更有利于提高剪切干涉的抗干扰能力。The cyclic radial shearing interferometry,which can be used to obtain the information of tested wavefront by only one interferogram,is suitable for dynamic wavefront measurements.Simultaneous phase-shifting technique which is convenient for interferogram processing,is adopted.Based on the cyclic radial shearing interferometry,one original interferogram is divided into four interferograms which have π/2 phase-shifting interval simultaneously by using a 2-dimentional orthogonal grating and polarization phase-shifting method.And the wavefront of the test piece is recovered with the 4-bucket algorithm and iteration method.The feasibility of the cyclic radial shearing interferometry based on polarization phase-shifting is validated by theoretical formula derivation,simulation analysis and primary experimental testing,the result shows that RMS precision is better than λ/100.Furthermore,the means with diffraction grating splitter and polarization phase-shifting,which is anti-vibration,not only can be used to overcome the disadvantage of complicated single interferogram processing,but also can be propitious to improve the ability of anti-disturbance of radial shearing interferometry.

关 键 词：光学测量 径向剪切干涉术 偏振移相 动态波前检测 

分 类 号：O436[机械工程—光学工程]