定容式气体微流量计的测量误差分析  

ERROR ANALYSIS OF MEASUREMENT OF CONSTANT VOLUME FLOWMETER

作　　者：孟扬[1] 李旺奎 

机构地区：[1]兰州物理研究所

出　　处：《真空与低温》1998年第3期175-178,共4页Vacuum and Cryogenics

摘　　要：从原理上对定容式气体微流量计（ＣＶＦＭ）和带参考室的ＣＶＦＭ的流量测量误差进行了理论分析。测量过程中温度变化对ＣＶＦＭ的流量测量误差作用较大，是影响ＣＶＦＭ测量下限的一个主要因素。为ＣＶＦＭ增加一个参考室，可以减少测量过程中温度变化对ＣＶＦＭ的流量测量误差的贡献。The errors of measurement of CVFM and CVFM with a reference chamber were analyzed in the paper.The variation of temperature in the measurement process is one of main factors which influencing the error of measurement and the lower limit of measurement.With a reference chamber,the error of measurement contributed by the variation of temperature can be reduced.

关 键 词：流量计 测量误差 气体微流量计 CVFM 真空测量 

分 类 号：TB77[一般工业技术—真空技术]