一种压电陶瓷微位移测量的新方法  

A New Method of Detecting the Microdisplacement of PZT

作　　者：范彦平[1] 朱灵[1] 巫建东[1] 许良元[1] 翟玉锋[1] 朱震[1] 刘勇[1] 王安[1] 

机构地区：[1]中国科学院安徽光学机密机械研究所激光中心,安徽合肥230031

出　　处：《压电与声光》2010年第1期82-85,共4页Piezoelectrics & Acoustooptics

基　　金：中国科学院合肥研究院基金;创新科研专题基金资助项目(NO.20020603)

摘　　要：提出了一种简单、有效的基于光纤Fabry-Perot干涉的压电陶瓷(PZT)微位移测量的新装置,为提高干涉现象,在Fabry-Perot干涉腔两端面上分别镀不同反射率的薄膜。通过软件编程快速实现对干涉条纹的计数进而确定PZT的微位移,得到的位移电压斜率误差小,实现了对PZT微位移的实时快速测量。测试了同频率不同腔长和同腔长不同频率的压电特性,结果表明变化很小,说明该方法可操作性强,可靠性高。分析了光纤耦合效率和光源的相干性等对实验的影响。A simple and effective approach,based on fiber optic Fabry-Perot interferometer, was proposed to detect the micro displacement of PZT. In order to promote the phenomenon of interference, both side of Fabry-Perot cavity were coated film with different reflectivity. The PZT micro displacement was acquired by programming software to counting the number of fringes. The obtained slope inaccuracy of displacement to voltage was small, and a rapid and real-time testing of PZT micro displacement was realized. Piezoelectric property was tested under the condition that the driving frequency was fixed and the length of cavity was varied or the length of cavity was fixed and the driving frequency was varied. The result of the experiment,varied a little, indicated the method had a strong operability and high reliability. The influence of the coupling efficiency,sources coherence was analyzed.

关 键 词：光纤Fabry-Perot干涉 压电特性 微位移 干涉条纹 

分 类 号：TN247[电子电信—物理电子学]