UV-LIGA和微细电火花加工技术组合制作三维金属微结构  

Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology

作　　者：杜立群[1,2] 莫顺培[1] 张余升[2] 刘冲[1,2] 

机构地区：[1]大连理工大学辽宁省微纳米技术及系统重点实验室,辽宁大连116024 [2]大连理工大学精密与特种加工教育部重点实验室,辽宁大连116024

出　　处：《光学精密工程》2010年第2期363-368,共6页Optics and Precision Engineering

基　　金：国家科技支撑计划资助项目(No.2006BAF04B13);国家自然科学基金资助项目(No.50675025;No.50775020)

摘　　要：为了制作三维金属微结构,研究了UV-LIGA和微细电火花加工技术组合的工艺方法。使用UV-LIGA技术制作了准三维金属微结构,然后,对该微结构进行微细电火花加工制作三维金属微结构。使用提出的方法制作出了局部为梯形凸台和锥形凹槽三维微结构的镍模具,给出了梯形凸台和锥形凹槽的尺寸。分析了微细电火花加工中放电参数对表面粗糙度的影响,在工作电压为65V,标称电容为100pF时得到了Ra为0.08μm的微细电火花加工表面。研究结果表明,使用该方法可实现三维金属微结构的制作;通过减小工作电压和标称电容的方法可降低微细电火花加工的表面粗糙度。In order to fabricate 3D metal microstructures, a combined machining process based on UV- LIGA and micro Electrical Discharge Mechining（EDM） technology was proposed. Firstly,a quasi-3D metal microstructure was fabricated by UV-LIGA technology, and then a 3D metal microstructure was fabricated by micro-EDM. A 3D nickel mold with the local trapezium protrusion and taper groove was fabricated by this method and the sizes of the trapezium protrusion and taper groove were given in detail. Meanwhile, the influence of micro-EDM discharge parameters on the surface roughness was analyzed. The results show that the surface roughness is 0.08 μm, when the operating voltage and nominal capacitance are 65 V and 100 pF respectively. The research results demonstrate that the 3D metal microstructure can be fabricated by this method and the surface roughness will decrease by reducing the operating voltage and nominal capacitance.

关 键 词：三维金属微结构 UV-LIGA 微细电火花加工 组合制作 表面粗糙度 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]